Hi everyone,

I met a problem when I use the mask aligner. The aligner is Karl Suss MA6.
It's pretty new one. The mask is a glass plate with transparency sheet on.
The problem is that I can't hold the mask. It always say that mask vacuum
is off. I checked the pipe and connection and they are sealed well. The
only problem is the sealing between the mask and chunk. I tried to press
the mask but still had the same problem. It seems the chunk design  from
the manufacturer has some problem. But I doubt it. Are there anyone who had
this kind of problem before?

Thanks

Li Wang
Carnegie Mellon University
412-2682514