Dear BALGOVIND, Dear Sooje Cho, Plan Optik GmbH in Germany is producing glass wafers for anodic bonding and can supply a lot of sizes from stock (e.g. 4" x 500 microns). Please tell me the details regarding the size you need (diameter and thickness). Plan Optik does also produce glass wafers with a special surface treatment which are suitable for glass-glass bonding without any intermediate layer. Best regards, Carsten Wesselkamp Plan Optik GmbH Unter den Eichen 56479 Elsoff Germany Tel.: +49-2664-5068-25 Fax: +49-2664-5068-91 -----Original Message----- From: mems-talk-bounces+c.wesselkamp=planoptik.com@memsnet.org [mailto:mems-talk-bounces+c.wesselkamp=planoptik.com@memsnet.org]On Behalf Of mems-talk-request@memsnet.org Sent: Friday, August 29, 2003 3:53 PM To: mems-talk@memsnet.org Subject: MEMS-talk Digest, Vol 10, Issue 35 Send MEMS-talk mailing list submissions to mems-talk@memsnet.org To subscribe or unsubscribe via the World Wide Web, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk or, via email, send a message with subject or body 'help' to mems-talk-request@memsnet.org You can reach the person managing the list at mems-talk-owner@memsnet.org ------------------------------ Message: 2 Date: Thu, 28 Aug 2003 15:56:46 +0530 From: "balgovind.iitkgp"Subject: [mems-talk] help needed To: "General MEMS discussion" Message-ID: <200308281040.QAA22773@WS0005.indiatimes.com> Content-Type: text/plain; charset=us-ascii Hello Everybody ! Please help in following regards 1) I would like to know the process parameters(temperature and concentration of etchants) and the etchants required for etching 500 micron hole through normal glass and pyrex 7740. The masking layer will be Cr/AU. 2) Vendors for pyrex 7740, who can deliver some 30 pieces of pyrex 7740 at earliest. I'm based in India. 3) The kind of (quality and quantity) of work I should do on anodic bonding and glass etching to get an IEEE paper published Thanking in advance to those who reply. with warm regards to all BALGOVIND ------------------------------ Message: 5 Date: Thu, 28 Aug 2003 22:42:23 +0900 From: "Sooje Cho" Subject: [mems-talk] Glass-Glass thermal fusion bonding To: Message-ID: <000601c36d6a$38cbd7f0$0100a8c0@MEMSware1> Content-Type: text/plain; charset="us-ascii" The glasses are bonded generally at elevated temperature. The temperature is varied by the glass composition. General sodalime glass is bonded at the temperature of 500C-600C. The surface of glass must be polished finely to get good bonding. Vacuum annealing(heating) has good effects in case your glass is not polished. Sooje Cho from MEMSware