Have you considered a polyimide? We used to process on 0.005" (127 micron) thick Kapton from DuPont. -Mike >>> bobdavies@ntlworld.com 08/29/03 6:57 PM >>> Hello Everyone, I am new to playing with SU-8. Rather than spin coat and process on silicon I wish to replace the silicon wafer with a plastic substrate to which the SU-8. Compatibility of the SU-8 with the plastic requires that: 1 The resist must adhere to the plastic 2 Solvent in SU-8 and developer must not swell or dissolve the plastic 3 Plastic should expand and contract isotropically during the baking and cooling processes with a similar thermal expansion coefficient to the SU-8 (polymerised. Does anyone out there have any suggestions about a suitable plastic ? If you do and it is them my life gets easier. Many thanks to you all. Bob _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/