Hi MEMS workers,

I have a question about tempeature sensing in MEMS. I
had heard something about sensing the temperature
using a serpentine structure on the substrate.
However; I could not find much information on the web
regarding this. I am also interested in other methods
of sensing temperature of the ambient air in the same
scale.

It would be a great help to my efforts if somebody
could suggest me a link or any literature to help me
how it can be sensed.

Thanks a lot for the kind of help you guys have been
providing from this thread. I hope i can get some this
time too..

Thanks a lot and regards!
ramji Dhakal

=====
Ramji Dhakal

M S Mechanical Engineering,
SUNY Binghamton, NY

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