Hi Srikanth, Zyvex has developed a software called MEMulator which accurately emulates both isotropic and anisotropic etch. Additionally it supports isotropic and anisotropic deposition, CMP, wafer bonding and electroplating. The MEMulator has been licensed by Coventor and will be available early October. Please contact them (www.coventor.com) to obtain an evaluation. Regards, Rahul Saini MEMS Engineer Zyvex Corporation rsaini@zyvex.com -----Original Message----- From: mems-talk-bounces+rsaini=zyvex.com@memsnet.org [mailto:mems-talk-bounces+rsaini=zyvex.com@memsnet.org] On Behalf Of Srikanth Gopal Sent: Thursday, September 18, 2003 12:21 PM To: mems-talk@memsnet.org Subject: [mems-talk] Simulation software for anisotropic or isotropic etching for highaspect ratio Si towers Hi all, I am looking for a etching software to simulate etching process for high aspect ratio Si structures (towers of Si with an oxide layer on top ) which look like the one shown below, Bye,have fun Srikanth. --------------------------------- Do you Yahoo!? Yahoo! SiteBuilder - Free, easy-to-use web site design software _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/