Shipley has a product, BPR100, that is a spin on negative tone photoresist
that is used for KOH etching at 90C.
Find info at www.Shipley.com, under EIF division page..Bob
>
> I want to use CYCLOTENE resine BCB-4000 as protective coating during
silicon
> etching in pottasium hydroxide KOH at 85C, which must be removed at the
end of
> processing.
>
> It will be very helpful if anyone can give information about this BCB
process.
>
> Thanks and Regards,
>
> Mohamed SAADAOUI
> Laboratoire d' Analyse
> et d' Architectures Systemes
> LAAS- TOULOUSE. france