Hi Yilei, the best place to start with polysilicon is the book by T. Kamins, "Polycrystalline Silicon for Integrated Circuits and Displays 2nd ed." Kluwer 1998. there are many many excellent papers on polysi, that discuss everything from microstructure to stress.. etc.. P. Joubert, B. Loisel, Y. Chouan, and L. Haji, The Effect of Low Pressure on the Structure of LPCVD Polycrystalline Silicon Films, J. of the Electrochemical Society, 134 (10), 1987 p. 2541-2545. P. Krulevitch, T. Nguyen, G. Johnson, R. Howe, H. Wenk, and R. Gronsky, LPCVD Polycrystalline Silicon Thin Films: The Evolution of Structure, Texture and Stress, Materials Research Society Symposium Proceedings, 202, 1991, p.167-172. P. Krulevitch, G. Johnson, R. Howe, Stress and Microstructure in LPCVD Polycrystalline Silicon Thin Films: Experimental Results and Closed Form Modeling of Stress, Materials Research Society Symposium Proceedings, 239, 1992, p.13-18. W. Sharpe, B. Yuan, and R. Edewrds, Fracture Tests of Polysilicon Film, Materials Research Society Symp. Proc., 505, 1998, p. 51-56. there are many good papers by Sharpe on polysi and many many more.. As far as grain size measurement goes; cross sectional and plan view TEM is by far the best way to go, but also the most difficult and expensive. AFM is very good as well but will only give you a view of the surface grain size which could be misleading, and can also give you a measure larger than reality due to tip limitations. Some glancing angle Xray techniques will also be effective, however the facilities are rather specialized. I've sent some samples previously to AMIA labs with good results. here is their contact info: http://www.rigakumsc.com/contract/amia.jsp good luck.. dave kharas ph.d. dave_kharas@yahoo.com From: "Yilei Zhang"Subject: [mems-talk] book about grain size measurement Date: Fri, 3 Oct 2003 23:36:01 -0500 (CDT) To: mems-talk@memsnet.org Dear Members: Can anyone recomment some books/papers about polysilicon grain size measurement? Now I am trying XRD and AFM. Thanks. Regards, Yilei Zhang __________________________________ Do you Yahoo!? The New Yahoo! Shopping - with improved product search http://shopping.yahoo.com