You can use a teflon film which can be spun on. If you are interested, please let me know. EH -------------------------------------------- E.H.Yang, Ph.D Fujita lab.,IIS, Tokyo Univ. Tel:+81-3-3402-6231(ext. 2354) Fax:+81-3-3402-5078 email:ehyang@fujita3.iis.u-tokyo.ac.jp http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html shpaek wrote: > > Dear MEMS ; > I'm searching a passivation material for Si KOH-etching. > It takes a long time for Si etching and > I must protect front side of wafer. > Al layer is deposited on the Front side. > Does anyone tell me the material and method of protection? > > Si etch thickness ; 450 micron > Si etch solution ; KOH + IPA > > I'll wait for your quick response. > > > Sincerely yours. > >