> I would like to ask you about the recipe of Ti etchant. We are going to > etch a <50 nm thick Ti layer on epitaxial barium titanate. Since this > material must be unfamiliar with you, you don't forget about it. I just > want to know what kinds of etchant you usually fix for Ti etching. > Thanks a lot in advance. > T. Sophie Hamano You can use 10 H2O : 1 H2O2 (30%) : 1 HF (49%). My measured etch rate for sputtered titanium is 1.1 um/min = 1100 nm/min. --Kirt Williams, Ph.D. consultant