durusmail: mems-talk: : MEMS Testing
: MEMS Testing
2003-10-29
: MEMS Testing
Trisha Browne
2003-10-29

Hello,

I am looking for mems devices (wafer, die, or uncovered/covered
packaged) to continue to explore the application space for our Veeco
DMEMS Stroboscopic Interferometer.  On top of being able to fully
characterize static mems devices, there is now an option to do full 3D
dynamic characterization, both in-plane and out of plane.  It has
analyses capabilities to measure resonant freqs, modal analysis, and
settling times, plus characterization of surface deformation over time
in terms of changes in heights, lateral motion, shape, curvature, tilts,
surface roughnesses, etc.  It can measure samples up to the MHz range.

In return for us characterizing 1 or 2 of your devices, we would request
to use the data in technical papers regarding Metrology and MEMS in
terms of testing and reliability.

If you are interested, please either give me a call or contact me via
email.

Regards-

Trisha


Patricia Browne
Product Manager - MEMS Test & Characterization Tools
Veeco Metrology
2650 E Elvira Rd
Tucson, AZ 85706
P: 520-741-1044X1091
tbrowne@veeco.com


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