Hello, I am looking for mems devices (wafer, die, or uncovered/covered packaged) to continue to explore the application space for our Veeco DMEMS Stroboscopic Interferometer. On top of being able to fully characterize static mems devices, there is now an option to do full 3D dynamic characterization, both in-plane and out of plane. It has analyses capabilities to measure resonant freqs, modal analysis, and settling times, plus characterization of surface deformation over time in terms of changes in heights, lateral motion, shape, curvature, tilts, surface roughnesses, etc. It can measure samples up to the MHz range. In return for us characterizing 1 or 2 of your devices, we would request to use the data in technical papers regarding Metrology and MEMS in terms of testing and reliability. If you are interested, please either give me a call or contact me via email. Regards- Trisha Patricia Browne Product Manager - MEMS Test & Characterization Tools Veeco Metrology 2650 E Elvira Rd Tucson, AZ 85706 P: 520-741-1044X1091 tbrowne@veeco.com