Hello. I recommend these books for you. It will be great help for your exiperiment. 1. Fundamentals of Microfabrication 2nd ed. Marc J. Madou , CRC press This book can be called an encyclopedia of mems technology at present. Especially , it has many references source. so you can find easily the original paper which you want to read. 2. Microsytem Design Stephen D. Senturia , Kluwer Academic Publishers This book is easy to read and understand. It also shows a lot of skills and techs. about on desigining microsytem. If you have another good information, please let me know that. Thanks. Choe,S-H Esashi Lab. Tohoku Univeristy. E-Mail: choe@mems.mech.tohoku.ac.jp