durusmail: mems-talk: E-beam evaporator needed
E-beam evaporator needed
2003-11-12
R. Brent Garber (2 parts)
E-beam evaporator needed
Michael D Martin
2003-11-11
Hi,
   Can you guys supply a recomendation for an e-beam evaporator. We
would like a research grade system that handles multiple 4" wafers and
has at least 2 targets with a uniformity of at most 10% over 100 mm.

Thanks in advance...
   Mike
   U of Louisville

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