durusmail: mems-talk: metal plating high aspect ratio structures
metal plating high aspect ratio structures
2003-11-24
2003-11-25
metal plating high aspect ratio structures
BobHendu@aol.com
2003-11-24
I don't remember the name of the company but at one time they were touting the
ability to sputter aluminum over very high aspect ratio features then
recrystalize the aluminum with a lazer scanning system basically reflowing the
aluminum to fill the gap. Anyone remember the company. Bob Henderson

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