I am working with the University of South Florida on rebuilding a plasma etcher, Plasmaline model 211 manufactured by Tegal Corporation. Does anybody have any information (manuals, schematics, or general knowledge) on this system? I have called Tegal Corporation but they don't support a system this old. Thanks *************************************************** Jim Culver Raytheon E-Systems Communication Division 1501 72nd Street St Petersburg, FL 33710 e-mail jwcb@eci-esyst.com ***************************************************