Jen - I work for a company that uses vacuum to remove all air from a process chamber (eliminating the air to surface barrier) to achieve significantly better than typical cleaning. We also have a new patented technology that targets contaminates on surfaces for removal without using ultrasonic energy (long story short, we grow a bubble on the contaminate and then cause the bubble to implode releasing its energy to remove the contaminate. If you are interested please feel free to drop me a note at hyperflo@hyperflo.com. Thanks. Jack -----Original Message----- From: mems-talk-bounces+mulligan=globalcrossing.net@memsnet.org [mailto:mems-talk-bounces+mulligan=globalcrossing.net@memsnet.org]On Behalf Of Jen Robertson Sent: Friday, December 19, 2003 6:05 PM To: mems-talk@memsnet.org Subject: [mems-talk] cleaning small chips Hi- Is there a good way to clean small (<5mm square) silicon chips? Our chips have lots of visiable residues after the dicing process, either from the dicing tapes or wafer dusts. We have tried soaking in many different solvents but cannot seem to get rid of them. These chips have fragile MEMS structures on them and will break if we use ultrasonic agitation. Any suggestion would be greatly appreciated. Thanks! Jen --------------------------------- Do you Yahoo!? Free Pop-Up Blocker - Get it now _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/