Dear Colleagues,

We are interested in using dry etching (RIE or ECR) to pattern cured silicone
rubber.

Our first attempt was with using oxygen in our RIE system, but even at high
power we obtained very little etching.

Does anyone know whether a different gas (e.g., containing fluorine) might
provide more vigorous etching?

Your comments are much appreciated.

Sincerely,

Adam Cohen
USC