Actually, you could compute the temp of the wafer to the first order by simply computing the Weight of aluminum from the thickness, diameter, and density of the aluminum, then take the latent heat of vaporization and the specific heat of silicon. That will yeild an equlibrium temperature assuming that there is no heat loss, one can then assume some losses and estimate the temperature. Of course the heat losses go up with time so that if you took a longer time to deposit the heat loss term would tend to dominate. Gary Gary Hillman Service Support Specialties, Inc. 9 Mars Court PO Box 365 Montville, NJ 07045 973-263-0640 973-263-8888. -----Original Message----- From: MT Klaus Beschorner [SMTP:metal@caby.de] Sent: Saturday, February 07, 2004 7:47 PM To: mems-talk@memsnet.org Subject: [mems-talk] What could be wafer surface temperature > 10. What could be wafer surface temperature during sputter > deposition w/ Al deposition, 10000W, 150sccm Ar flow, 12min > deposition time? (Cheol Han) The wafer surface is where vapour phase Al condenses to the solid state, so as an estimate you can use the boiling point of Al. If what you really mean is the substrate temperature, without active heat sinking (backside gas), a 2?m Al deposition in 1.5 min. has been measured to heat a standard wafer from room temp. to over 550 C. best regards, klaus -- Klaus Beschorner Metron Technology Europe, PVD (Eclipse) Process Manager Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683 _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/