durusmail: mems-talk: deep glass etching
deep glass etching
2004-02-14
2004-02-17
deep glass etching
BobHendu@aol.com
2004-02-16
Chenyen:

What type of glass are you using? We have only had success only etching fused
silica or quartz. I have not found a good way to etch pyrex in plasma yet but I
keep trying. Bob Henderson


reply