Anthony, To etch the ITO, HCl will work. Data on HCl etching of ITO can be found here: http://www.betelco.com/sb/phd/ch5/c52.html Commercial ITO Etchant http://www.transene.com/tino.html MSDS can be found http://grover.mirc.gatech.edu/data/msds/406.html This is made up of FeCl-HCl-H2O. If you hunt around a bit, you should be able to find the proportions of each etchant required. Both etchants will leave SiO2 unetched, to my knowledge. Good Luck, ************************************ Philip D. Floyd, Ph.D. Iridigm Display Corporation 2415 Third Street, Suite 235 San Francisco, CA 94107 ph: (415) 626-8800 x138 fax: (415) 626-9775 email: pfloyd@iridigm.com web: http://www.iridigm.com/ ************************************* ############################################################################ ############################################## This email communication may contain CONFIDENTIAL INFORMATION of IRIDIGM DISPLAY CORPORATION and is intended only for the use of the intended recipients identified above. If you are not the intended recipient of this communication, you must not use, disclose, distribute, copy or print this email. If you have received this communication in error, please immediately notify the sender by reply email, delete the communication and destroy all copies. ############################################################################ ############################################## -----Original Message----- From: Anthony [mailto:amarrs@intellite.com] Sent: Monday, February 23, 2004 5:33 AM To: mems-talk@memsnet.org Subject: [mems-talk] ITO Etch selective to glass I am looking for an etch that will remove Indium Tin Oxide (ITO) on a glass lens without damage to the lens. The ITO will need to be patterned. What would be the best approach to do this? Anthony Marrs Intellite amarra@intellite.com _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/