Hi Anthony, 17% HCL (and water) and room temperature should etch ITO at a rate of at least 100A/min. The HCL mixture will be selective to glass, and also safe to have a photoresist pattern present. - Justin Justin C. Borski MEMS Program Manager Advanced MicroSensors Inc. jborski@advancedmicrosensors.com -----Original Message----- From: Anthony [mailto:amarrs@intellite.com] Sent: Monday, February 23, 2004 8:33 AM To: mems-talk@memsnet.org Subject: jborski@advancedmicrosensors.com - Email found in subject - [mems-talk] ITO Etch selective to glass I am looking for an etch that will remove Indium Tin Oxide (ITO) on a glass lens without damage to the lens. The ITO will need to be patterned. What would be the best approach to do this? Anthony Marrs Intellite amarra@intellite.com _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ **********************AMS CONFIDENTIAL AND PROPRIETARY INFORMATION***************************** This e-mail communication and any attachments are confidential and intended only for the use of the designated recipients named above.