Zheng

Take a 4" Si wafer and mount your rectangular glass piece in center of the
wafer. Mount the wafer on the spin coating chuck, and keep on dispensing the PR
only in the center of the glass piece until PR covers almost entire area of the
glass piece. Rest of the processing steps like spinning, RPM etc are same. If
you have thick glass piece, then you have to try circular Aluminum fixture
instead if Si wafer.

Good luck

(Pramod Gupta)

Zheng Xia  wrote:
Hi,

Does anyone have suggestion on how to apply uniform resist on
rectangular shape glass slides (1 x 3 inch)? I tried to spin them with
full coverage of resist on slides, but the result is not good. Resist
sometimes cannot reach corners, and it shows certain interference
pattern under light, indicating the unevenness of resist thickness.
Thank you.

Best,

-------------------------
XIA, ZHENG
Microfluidics and BioMEMS Lab
Interdisciplinary Microsystems Group
Department of Mechanical and Aerospace Engineering
University of Florida
-------------------------


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(Pramod Gupta)

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