For an introduction to MEMS, I suggest two places: First, a graduate student at U. Surrey (England) has set up some very informative web pages: http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html Second, the very first paper you should read is "Silicon as a Mechanical Material" by Kurt Petersen. Proc IEEE vol 70, no 5. pp 420-457, May 1982. heather klaubert hlk20@eng.cam.ac.uk ______________________________ Reply Separator _________________________________ Subject: References?? Author: "Valdes; Erica R. (Petersen)"at internet Date: 3/20/97 2:20 PM Can you recommend some good review-type references on MEMS? Something that would be appropriate in the context "If you would like to learn more about MEMS refer to ________ "? Thanks in advance! Erica Valdes U.S.Army ERDEC ervaldes@cbdcom.apgea.army.mil