durusmail: mems-talk: new circuit interface in integrated humidity sensor
new circuit interface in integrated humidity sensor
2004-03-10
new circuit interface in integrated humidity sensor
daven chou
2004-03-10
 Dear everyone:
        I wanna get the latest information about the circuit interface about
capacitive MEMS humidity sensor .I used polyimide as a sensitivity layer.
        Thanks a lot!
yours sincerely
Daven Chou
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