Hi,

   I'm looking for an anisotropic Si etch recipe that gives high
(greater than 20) (111) to (100) etch ratios. The EDP recipe that I'm
presently using gives an inconsistent ratios of 6 to 29 (with the same
bath). Unfortunately, I can't use KOH for my application, so I guess
I'm lloking at EDP or TMAH. Any suggestions would be welcome.

  Thanks

      Ken Westra
      Alberta Microelectronic Centre
      westra@amc.ab.ca