Alignment marks are different depending on what A&E tool you use. Different
vendors (ie. Canon, Nikon, etc) use different marks. Even with the same
vendor, different generations of tools different marks. A printer doesn't
use the same marks as a stepper, in part due to the different alignment
lazers used. Contact your tool vender and they should be able to supply what
marks work best with that tool.

Robert

-----Original Message-----
From: mems-talk-bounces+r-black1=ti.com@memsnet.org
[mailto:mems-talk-bounces+r-black1=ti.com@memsnet.org]On Behalf Of Isa
Kiyat
Sent: Friday, March 12, 2004 1:34 AM
To: General MEMS discussion
Subject: [mems-talk] Alignment marks


I am designing a photomask. I will have a two step lithography with maximum
0.5 um tolerance. I need your suggestions about the kind of alignment marks
I should use (shape, dimension any experience will help) . Thanks.
=================================

Isa Kiyat




_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/