durusmail: mems-talk: thin pmma (20-60 micron) ?
thin pmma (20-60 micron) ?
thin pmma (20-60 micron) ?
Osipowicz, Thomas PHYTO
1997-04-17
Hi all,

We ( Nuclear Microscopy Group, NUS, Singapore) are currently working
on a LIGA-like process that uses a focussed 2 Mev proton beam to
direct write structures in PMMA. We were able to make 60 micron deep
structures (eg walls, letters) with 1-2 micron width. We did this
using bulk pmma. We are now looking for pmma on a substrate, eg Si or
some metal, with thickness in the range from 10 to 60 microns, 20
microns woud be ideal.  Is there a commercial a source for such
material?  Is it (maybe) easy to make? We are no experts in this.
Spin-coating seems to be the process to use.  Any advice?

Thanks in advance.

cheers

Thomas Osipowicz


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