Hi all, We ( Nuclear Microscopy Group, NUS, Singapore) are currently working on a LIGA-like process that uses a focussed 2 Mev proton beam to direct write structures in PMMA. We were able to make 60 micron deep structures (eg walls, letters) with 1-2 micron width. We did this using bulk pmma. We are now looking for pmma on a substrate, eg Si or some metal, with thickness in the range from 10 to 60 microns, 20 microns woud be ideal. Is there a commercial a source for such material? Is it (maybe) easy to make? We are no experts in this. Spin-coating seems to be the process to use. Any advice? Thanks in advance. cheers Thomas Osipowicz