Hi everyone,

Does anyone know about the effect of TMAH selectivity of Silicon to
Silicon oxide with change in the TMAH concentration ?

I have not been able to find any paper which documents this, although
there a quite a few papers which talk about TMAH undercutting,
improving surface quality, decreasing Al etch etc..

Any pointers will be greatly appreciated....

Thanks...

Manish Mehta
email: mehta@cs.sfu.ca