Mike, I can not say for sure but I suspect HMDS will work. If not call me. I am original designer of the vacuum vapor primer and we have a new unit for deposition of odd silanes for copper capping etc. This can put down controlled levels of say APTES 4 Angstroms, 6,8 10 etc. Bill Moffat 408 954 8353. -----Original Message----- From: Michael Woodson [mailto:mwoodson@chem.duke.edu] Sent: Monday, April 05, 2004 12:51 PM To: MEMS-exchange mailing list Subject: [mems-talk] monolayer HF resist? Hello, everyone! I need to form a monolayer on a Si surface that can survive in HF long enough for some small (about2nm) SiO2 structures to be removed. This is for an AFM lithography experiment, and resolution is important, so the resist must be a monolayer or multilayer. Can HMDS survive if the concentration and exposure times are low? Thanks in advance, Mike Woodson Duke University _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/