Gavin, You may actually want to try a syringe. Be careful to make sure that you use one without any lubricant or rubber o-ring; you don't want to introduce any new variables by mixing in additional chemicals. Also, to fill the syringe, you may want to first pour the SU-8 carefully into a beaker. Best bet is to pour slowly down the side to avoid introducing bubbles (kind of like beer...) Then draw into the syringe slowly, trying to avoid any small bubbles (the big ones will settle themselves out). This will allow you to place the syringe nozzle cose to the wafer surface for dispense, and avoid the "folding" effect of trying to dispense from to great a height. Best Regards, Chad Brubaker EV Group invent * innovate * implement Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail: C.Brubaker@EVGroup.com, www.EVGroup.com This message and any attachments contain confidential or privileged information, which is intended for the named addressee(s) only. If you have received it in error, please notify the sender immediately and then delete this e-mail. Please note that unauthorized review, copying, disclosing, distributing or otherwise making use of the information is strictly prohibited. -----Original Message----- From: mems-talk-bounces+c.brubaker=evgroup.com@memsnet.org [mailto:mems-talk- bounces+c.brubaker=evgroup.com@memsnet.org] On Behalf Of Gavin Wu Sent: Wednesday, April 21, 2004 9:45 AM To: mems-talk@memsnet.org Subject: [mems-talk] SU-8 spin coat Dear all, I am a novice on using SU-8. I've ordered MicroChem 2025 and tried to spin-coat a 2" wafer. Since SU-8 is really thick and sticky, I applied it onto the wafer surface before spinning with a small beaker instead of a pipette. I also slowed down the accelerating ramp of the spinning chuck. But I've never been able to get a uniform layer or smooth surface without streaks. I know the problem might be in the bubbles generated when applying the SU-8, which is kinda unavoidable. Anyone has a better idea on the *tool* (I mean beakers, pipettes, etc) for applying SU-8? Or anyone know the secret of getting a uniform layer? I guess the answer could be somewhere in the archive. But I just need an answer really quickly. Thanks very much. Gavin _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/