Dear Lin, In my work with KOH etching. A 0.6 micron Silicon dioxide mask lasted for 1 hour and 30 mins for a conc. Of 40-45% and temp of 85 degrees. The etch selectivity for nitride must definitely be a lot better. The stirring rate is also really important and is good to keep it quite high. Make sure the there is easy access for the etchant to attack the etch surface. Hope it helps! Regards Ashwin -----Original Message----- From: mems-talk-bounces+ashwin_uta=hotmail.com@memsnet.org [mailto:mems-talk-bounces+ashwin_uta=hotmail.com@memsnet.org] On Behalf Of g915705@oz.nthu.edu.tw Sent: Saturday, May 01, 2004 9:38 AM To: mems-talk@memsnet.org Subject: [mems-talk] Mask against TMAH and KOH Etching Dear all: I have questions about the TMAH and KOH etching. I use a layer of LPCVD nitride with 1500A thick. After 3 hours KOH etching (30% w.t., 80C), the nitride layer is etched seriously. Similarly, the nitride layer cannot survive in TMAH (8% w.t., 90C) for more than 5 hours. Is there any method or material that can be used as the etching mask in TMAH and KOH for at least 11 hours? Please give me some advice. I really appreciate it. Regards, Y.C. Lin Dept. of Power Mechanical Engineering, National Tsing Hua University, Taiwan. _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/