Hi,
We have a thermal stability issue in our pressure transmitter.

Description:
- SOI wafer is used for the piezo-resistive pressure sensor.
- The sensing element is mounted behind the diaphragm and the space in between
is filled with incompressible oil
- The pressure transmitter is built into stainless steel housing.
- The device operates below 150C in a stable condition. However over 150C
(tested up to 250C) the thermal stability becomes a problem.

Does anyone have any idea how to make the system thermally more stable (over
150C)?


Any help would be appreciated.


Thanks,

Jalinous
Intelligent MEMS Design, Inc.
Email: esfand@imemsdesign.com