Hello, I'm looking for small amount (~5pieces) of 3 inch double side polished wafers. Does anyone know any vendor does this bussiness? I'd appreciate any information. The wafer specifications are: 3in, <100>, P type, boron doped, 0.01ohm.cm (can be a little bit small or larger,as long as in between 0.008-0.015ohm.cm), perfered thickness 130um, but any thickness in betwee 100-150um is acceptable. Please reply to my email if you can help, not to the entire mems-talk list. Thank you for your attention. Lu