durusmail: mems-talk: PDMS glass bonding with allignment
PDMS glass bonding with allignment
2004-05-17
PDMS glass bonding with allignment
varun reddy
2004-05-17
Hi,
I need to bond PDMS to glass, and i have been having problems with this. I have
features on the cured PDMS that have to be aligned under the microscope to
patterned electrodes (Au/Cr) on a glass slide.

Since i need to align the pattern on the cured PDMS to the electrodes, i have a
delay of about 2-5 minutes after i have treated both the surfaces with an O2
plasma.

I have had better luck when i bond the PDMS with the glass slide immediately
after plasma treatment of the two surfaces without allignment.

Can anyone suggest a procedure that i can use to obtain fairly good bonding even
with the 2-5 min delay after treating the surfaces with an O2 plasma.


PDMS curing recipie -
10:1 (sylgard 184 elastomer base: sylgard 184 curing agent)
cure the PDMS for 1 hr at 60oC in an oven.



Thanks,

Varun Reddy




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