durusmail: mems-talk: BCB like resist with low curing temperature
BCB like resist with low curing temperature
2004-05-18
2004-05-24
BCB like resist with low curing temperature
Olivier Boulle
2004-05-24
> Hi,
> I am looking for a resist with good planarization properties, low
> thermal expansion (CTE), high resistivity,  good adherence of metals
> (like BCB) but with  low curing temperature ( typically T<150°). Please
> let me know if you heard about such a resist.
> Thanks!
> Best regards,
> Olivier Boulle
>
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