durusmail: mems-talk: Gas tight layer
Gas tight layer
2004-05-24
Gas tight layer
Tomi Meilahti
2004-05-24
Hi all.
We are trying to do a very thin (50-100nm) gas tight layer. Any suggestions
about materials or information sources that could be used on the project
would be greatly appreciated.
Best regards
Tomi Meilahti
Metorex International Oy



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