durusmail: mems-talk: microelectronic compatible material
microelectronic compatible material
2004-06-08
2004-06-08
2004-06-08
microelectronic compatible material
Cyrille Hibert
2004-06-08
Dear All,

In MEMS cleanroom people usually try to remain microlectronic compatible (no
gold...).
Does anybody has a good reference to know which material can be considered
compatible with "standard" IC processing?
What is about Ni?

Regards,
Cyrille.



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