durusmail: mems-talk: Negative angle after develop of negative resist
Negative angle after develop of negative resist
2004-06-27
Negative angle after develop of negative resist
David Ovrokzky
2004-06-27
Hello everybody,
I perform the lithography of thick layer (40µm) of Solder Mask (negative
resist) by Suss mask aligner.
Always I get the negative angle of the resist wall after even a very short
develop time.
Does anybody know how to prevent it?

Thanks

David


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