Dear MEMS experts,

I am relatively new to this discussion group and noticed that you
work a lot with PDMS.  May I ask your help with regards to achieving thin
layers of PDMS on wafer?

We would like to spin coat a PDMS (RTV 615 from General Electric) layer of
1um or less onto a 4-inch wafer.  Would you be able to suggest a solvent
ratio or spin recipe for this?

Thank you kindly,
Andrew Fung