Eric, I've used a bake process for 20µm thick AZ9260 that involves the following: Moderately increased temperature Moderately extended bake time Specific ambient conditions (unfortunately, I cannot disclose in a public forum, as it is proprietary) Ramped proximity profile As the ramped profile is a critical condition for this bake process, I don't want to spend too much time going into further detail, in case you don't have ramped proximity capability. If you would like additional discussion on this or related topics, feel free to give me a call (I've pretty extensive experience with thick film coating, even up to a 65 µm single coat of AZ9260, and single coats in excess of 100 µm with other positive materials). Best Regards, Chad Brubaker EV Group invent * innovate * implement Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail: C.Brubaker@EVGroup.com, www.EVGroup.com This message and any attachments contain confidential or privileged information, which is intended for the named addressee(s) only. If you have received it in error, please notify the sender immediately and then delete this e-mail. Please note that unauthorized review, copying, disclosing, distributing or otherwise making use of the information is strictly prohibited. -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Eric Miller Sent: Thursday, July 08, 2004 3:08 PM To: 'General MEMS discussion' Subject: [mems-talk] UV Cure of Thick Photoresist Can anyone suggest a robust, thick resist (up to 20 um) UV/hot plate cure process for AZ9260 or AZ4620 used as a mask in a DRIE Bosch process? Our standard process uses either a hot plat or oven, and we would like to find a process that would maintain better resist sidewall profiles, as well as increase the selectivity of the mask to silicon. We are planning to run some tests using a Fusion M150-PC. Eric Miller Em3@watechenter.org Ph: 206 616-3855 www.watechcenter.org _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/