I've tried small pieces in DRIE before. Just spinning coating a thin layer (2um) photoresist on top of carrier wafer and sticking sample to it on top, followed by hard bake, would help. Usually, I use AZ 9260 or 7220. Other PR should work also. Guo Xun -----Original Message----- From: Han Geun Yu [mailto:hxy141@psu.edu] Sent: Friday, July 09, 2004 2:40 AM To: mems-talk@memsnet.org Subject: [mems-talk] Question about thermal conductive glue for drie Hi, I am struggling with heat problem of substrate while doing drie. Because I use small piece, I need carrier wafer to do drie and I think it makes heat to flow little. If you know any glue or greese to increase the heat flow, please let me know. Thank you. Han