Hi,Kirt Williams: Do you need to bake the polyimide before you do wet etching? Another question is,will photoresist work as well as chromium? Thanks a lot. Ping Zhang ============== >We've tried a number of etchants for PI 2556, which I will guess is similar. >Piranha worked, but is too fast. >Microstrip 2001 (a commercial photoresist stripper), at 85 C, etched at >about 0.5 um/min. >You would have to use a hard mask such a thin layer of chromium. > --Kirt Williams > >----- Original Message ----- >From:>To: "mems-talk" >Sent: Wednesday, July 14, 2004 4:19 PM >Subject: [mems-talk] Polyimide Wet Etch > > >> Could anyone give me a recipe for wet etching polyimide (PI2555)? I tried >several ways but nor worked. >> >> Thanks >> - ware. >> >> >> >> _______________________________________________ >> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >> Hosted by the MEMS Exchange, providers of MEMS processing services. >> Visit us at http://www.memsnet.org/ > > > = = = = = = = = = = = = = = = = = = = =