Fritz, Off the shelf a vacuum high temperature oven that has multiple ramp temperature settings. It has a guaranteed low level of Oxygen, typically below 10 p.p.m., laminar flow, and hundreds out world wide, including automatic units. Look up www.yieldengineering.com for complete details. I will contact you later to see if you want a technical visit. Bill Muffed -----Original Message----- From: Michael D Martin [mailto:michael.martin@louisville.edu] Sent: Friday, July 16, 2004 12:28 PM To: mems-talk@memsnet.org Subject: Re: [mems-talk] Polyimide Curing Tool Hi Fritz, We use a two "tool" process 50 deg C - 200 deg C on a hotplate, then into a tube furnace purged with nitrogen from 200-350 deg C. -Mike >>> kub@nrl.navy.mil 7/16/2004 12:59:48 PM >>> We are in the process of purchasing a tool for for controlled 3-temperature step nitrogen-ambient curing of polyimide films? Could someone describe the preferred tool either homemade or commercial? Fritz Kub Naval Research Laboratory -- _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/