durusmail: mems-talk: An epoxy for DRIE
An epoxy for DRIE
An epoxy for DRIE
Krasniansky Vladimir
2004-10-03
Hi Nicolas,
 I use 353ND by Epoxy Technology, USA for mounting of wafers, and the
stack pass all operations (litho, chemical etches, evaporation and
sputtering properly). We not use DRIE, but I think it will be OK.


Sincerely,

Vladimir Krasniansky,

Process Engineer,

Gal-El (MMIC);

100, Yitzhak Hanassi Blvd., P.O. Box 330 Ashdod 77102, ISRAEL.

Tel 972-8-857-2436/4

Fax 972-8-857-2658







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