If you have 1500A Au seed layer over 800A Ti adhesion layer and you have reasonable contacts on the edge of the wafer you should have no problems with electroplating gold (assuming you solution is OK). The problem you describe appears to be surface contamination of Au seed layer. Excess current over accessible Au causes local delamination and exposes the underlaying Ti. You have a few options including either to use a commercial wafer cleaner or apply an oxygen plasma cleaning step prior to electroplating. Igor Kadija www.fibrotools.com ----- Original Message ----- From: "Robert Dean"To: "General MEMS discussion" Sent: Wednesday, October 06, 2004 9:39 AM Subject: [mems-talk] problems with gold plating > Hello, > > For a MEMS die bonding application, we need to plate 2um of Au onto a flat > silicon die cap that has TiAu (800A /1500A) E-beam deposited onto the SiO2 > surface layer. We are attempting to electroplate gold onto the entire > surface, i.e. no photoresist mold. When we have the current set low, we > only get gold plated in a few islands. When we increase the current until > we start getting uniform plating on the entire surface, we soon get one or > more black spots that grow in size and limit the plating. Any suggestions? > > Sincerely, > > Robert Dean > Auburn University > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ >