hi,

you can try the edge beam remover which provided by microchem.

alternatively, you can try the constant volume injection method to
avoid edge beam effect.
http://mml.es.ncku.edu.tw/study/Result/9-page/SU-8_che-hsin.pdf

gd luck n best rgds,
patrick chin



On Mon, 11 Oct 2004 13:41:23 -0400, Krishna Vummidi  wrote:
> Hi,
> Im trying to pattern su-8 on glass (square, rectangular slides). Edge bead
seems to be inevitable. Suggestions on minimizing them would be really
appreciated. thanks, krishna
>
> ``````````````````````````````````````````````````````````````````````````````
```````````````````````````````````````````````````
> Krishna Vummidi
>
> GRA, Wireless Microsystems Lab (www.ece.vt.edu/wml)
> The Bradley Department of Electrical and Computer Engineering
> Virginia Polytechnic Institute and State University
> 433 Whittemore Hall (Mail Code 0111), Blacksburg, VA 24061
>
> (540) 231-3411 (Voice) -3362 (Fax)        E-mail: kvummidi@vt.edu
>
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