folks, How can i test whether a liquid trapped inside a surface micomachined chamber has leaked through one of the etch holes or has evaporated. Thanks a lot. Sincerely Rakesh Katragadda --- Srinivas Parimiwrote: > Hello all, > > I need to use SU-8 as a masking layer in R.T. KOH > etching of silicon for > 3-4 hours. Is this possible or would I have the same > adhesion problems > associated with 70-90 C KOH etching ? > > I also need to know how many hours SU-8 can resist > 10 wt% HF. Is this also > a adhesion issue or will HF really attack SU-8 and > if so, with what etch > rate? > > Finally, Does anyone have a number on SU-8 > electrical resistivity? > > Thanks in advance > > -- > Srinivas Parimi > Research Assistant > Center for Microelectronics Sensors & MEMS (CMSM) > 372 ERC > University of Cincinnati > Cincinnati OH 45221 > (513) 556 4795 > Fax: (513) 556 7326 > sparimi@ececs.uc.edu > http://www.mems.uc.edu > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe > or change your list > options, visit > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS > processing services. > Visit us at http://www.memsnet.org/ > __________________________________ Do you Yahoo!? Y! Messenger - Communicate in real time. Download now. http://messenger.yahoo.com