does anybody know where I can get a high doped SOI wafer.
devise layer(Silicon) around 200-300 nm, SO2 layer higher than 200 nm.
dope above 1e18, which means resistivity below 0.05 ohm.cm.
or somebody know where I can dope the devise layer of SOI wafer.
I am at boston.

best

Yu Chen

10/31/2004

room 255, 590 commonwealth ave. boston, MA
cyyfq@bu.edu