Hellow, Anyone has comments or experience on microcracks of thick film ( 25 - 30 micron single coated AZ resist film ) after develop. It is really hard to find them before develop, or probably there no microcrack before develop. After coating, followed by 180 - 240 sec. bakd at 110 C. Exposures are done on a contact aligner tool. Maybe, this is a problem area, develop on a batch station for 4-5 min. What happen during this process and why? Thank you for sharing your experience and informaion. Jason Rim / AIO e-mail : jasonr@aio.com