Advice Please,

I have 100K available to purchase a PECVD System to deposite nitride and
perhaps oxide and poly  onto 2", 3" and 4" wafers.  I would appreciate
any recommendations, advice and comments.

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: kmwals01@starbase.spd.louisville.edu