Hi:

I am trying to deposit PTFE monolayer on Si by using c4f8 in
a DRIE-tool.  I was wondering if any of you have any
recommendation for this process such like annealing, surface
treatment, etc.  Does anybody know the maximum temperature
that these layers can resist?.  For my process also I need
to soak my samples in Acetone.  I just do not know what
would be the effect that this may cause in the PTFE layers.

Regards,
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Eric J. Correa Rivera
Graduate Student
Mechanical Engineering
University of Illinois at Urbana Champaign

"Nunca dejes de sonreír, ni siquiera cuando estés triste, porque nunca
sabes quien se puede enamorar de tu sonrisa"

                                                   Gabriel García Marquez
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